| 摘要 |
A high frequency matching apparatus is provided to prevent breakdown of a push switch even though the push switch is being used during a long time by supporting an operation member using a supporting member. A matching box(120) matches a high frequency power generated in a high frequency generator(100) to a high frequency power for manufacturing a semiconductor device. A matching box has a first connecting member(140) to be electrically connected to the high frequency generator. A coaxial cable(130) is electrically connected to the high frequency generator. The coaxial cable supplies the high frequency power to the matching box. The coaxial cable has a second connecting member(150) which is electrically connected to the first connecting member. A push switch(160) is mounted on the matching box. The push switch detects an electrical connection condition of the first and the second connecting members when the first and the second connecting members are electrically connected to each other. An operation member(155) is formed on an upper end of the second connecting member. The operation member pushes the push switch when the first and the second connecting members are electrically connected to each other. A supporting member(170) inserts and supports a ring in order to prevent the ring from being damaged by restoring force of the push switch. A loss preventing string(180) physically connects the supporting member to the matching box. The loss preventing string prevents the loss of the supporting member.
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