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发明名称
Verfahren zum Steuern des chemisch mechanischen Polierens von gestapelten Schichten mit einer Oberflächentopologie
摘要
申请公布号
DE10234956(B4)
申请公布日期
2007.01.04
申请号
DE20021034956
申请日期
2002.07.31
申请人
ADVANCED MICRO DEVICES INC.
发明人
WOLLSTEIN, DIRK;LINGEL, STEFAN;RAEBIGER, JAN
分类号
H01L21/302;B24B37/04;H01L21/00;H01L21/3105
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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