发明名称 |
MEMS DEVICE HAVING COMPACT ACTUATOR |
摘要 |
A MEMS device including a plurality of actuator layers formed over a substrate and a bimorph actuator having a substantially serpentine pattern. The serpentine pattern is a staggered pattern having a plurality of static segments interlaced with a plurality of deformable segments. Each of the plurality of static segments has a static segment length and each of the plurality of deformable segments has a deformable segment length, wherein the deformable segment length is substantially different than the static segment length. At least a portion of each of the plurality of deformable segments and each of the plurality of static segments is defined from a common one of the plurality of actuator layers.
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申请公布号 |
US2007001248(A1) |
申请公布日期 |
2007.01.04 |
申请号 |
US20060465367 |
申请日期 |
2006.08.17 |
申请人 |
ZYVEX CORPORATION |
发明人 |
GEISBERGER AARON;SARKAR NILADRI |
分类号 |
H01L29/82;B81B3/00;H01G7/00;H01L27/14 |
主分类号 |
H01L29/82 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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