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发明名称
Cluster-Tool mit zwei Entgasungs-/Kühlschleusenkammern
摘要
申请公布号
DE60119119(T2)
申请公布日期
2007.01.04
申请号
DE20016019119T
申请日期
2001.07.02
申请人
TEGAL CORP.
发明人
CLARKE, ANDREW
分类号
B65G49/07;C23C14/34;C23C14/56;H01L21/00;H01L21/02;H01L21/677
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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