| 摘要 |
A NAND flash memory device includes a semiconductor substrate having a drain select transistor; a source select transistor, and memory cell transistors connected in series between the drain select transistor and the source select transistor, and an oxide film formed in the semiconductor substrate at each of a first side and a second side of a gate of the source select transistor. A method of manufacturing a NAND flash memory device includes providing the semiconductor substrate and forming the oxide film in the semiconductor substrate at each of the first side and the second side of the gate of the source select transistor.
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