Measurement arrangement for carrying out irradiation attempts using e.g. ultra violet light such as in lithography systems

摘要

The apparatus has a gas tight housing (1) with a light entry window (2) and a sample holder (5,6,7). A light exit window (3) is disposed in the housing opposite the entry window. A light measuring device (4) is arranged behind the exit window for carrying out in-situ transmission attempts. Independent claims also cover a method of irradiation.