| 摘要 |
An apparatus and a method for inspecting patterns of a liquid crystal display device are provided to grasp an accurate cause of inferiority of patterns by cutting the inferior patterns and observing a section with an electron microscope, thereby taking necessary measures to cope with the inferiority. Worktables(131a,131b) are installed to put a liquid crystal display device having bad patterns on the worktables. A cutter(132) is installed at one side of the worktables for cutting patterns. An electron microscope(136) is installed at the other side of the worktables for observing cut patterns. |
