发明名称 |
PROCESS AND DEVICE FOR COATING DISK-SHAPED SUBSTRATES FOR OPTICAL DATA CARRIERS |
摘要 |
In order to achieve greater flexibility with a relatively simple equipment for coating substrates for optical data carriers, a coating device is disclosed with 1 to n inlet/outlet apertures and 2 to n coating apertures in a vacuum transport chamber. A number of spraying cathode arrangements which corresponds to the number of coating apertures is provided on the wall of the vacuum transport chamber. The device can provide two to n substrates in parallel with substantially identical layers or with different layers. Moreover, it can provide substrates with two to n layers in a mass-production installation. |
申请公布号 |
WO2006114227(A3) |
申请公布日期 |
2007.01.04 |
申请号 |
WO2006EP03592 |
申请日期 |
2006.04.20 |
申请人 |
STEAG HAMATECH AG;WEINDEL, CHRISTIAN;LUKHAUB, WALDEMAR |
发明人 |
WEINDEL, CHRISTIAN;LUKHAUB, WALDEMAR |
分类号 |
G11B7/26;C23C14/50;G11B7/24 |
主分类号 |
G11B7/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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