Vertical drive mechanism for fine-positioning of sensors and optical elements has an air-controlled relocating unit to move vertically along a guiding element

摘要

An air-controlled relocating unit (14) with a guiding element (2) forms a chamber (13), the capacity of which depends on an excursion in the relocating element. The chamber is impinged with compressed air. Permanent magnets (4) and/or electromagnets (5) fit on the relocating unit and/or the guiding element so as to achieve vertical, electro-dynamic fine-positioning.