Mobiles PVD/CVD-Beschichtungszentrum,申请号DE200521000023U-传众专利搜索

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发明名称	Mobiles PVD/CVD-Beschichtungszentrum
摘要
申请公布号	DE212005000023(U1)	申请公布日期	2007.01.04
申请号	DE200521000023U	申请日期	2005.03.24
申请人	OC OERLIKON BALZERS AG	发明人
分类号	H01L21/00;C23C14/00;C23C16/00;E04B1/348;E04H5/02	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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