| 摘要 |
<p>A flow rate measurement device having a pair of first and second centrifugal separation chambers (25, 26) with curved wall surfaces, a first introduction channel (27) for communicating a first auxiliary channel (21a) with one end of the wall surface of the first centrifugal separation chamber (25), an intermediate channel (29) for communicating the other end of the wall surface of the first centrifugal separation chamber (25) with one end of the wall surface of the second centrifugal separation chamber (26), a second introduction channel (28) for communicating the other end of the wall surface of the second centrifugal separation chamber (26) with a second auxiliary channel (22a), a first branch channel (35) communicating with the first centrifugal separation chamber (25) at a substantially right angle to the direction of the curvature of the wall surface of the first centrifugal separation chamber (25), a second branch channel (36) communicating with the first centrifugal separation chamber (26) at a substantially right angle to the direction of the curvature of the wall surface of the second centrifugal separation chamber (26), and a detection space section (23b) for communicating with each other the first branch channel (35) and the second branch channel (36) and having a detection element placed in the space section (23b). The flow rate measurement device can reliably separate dust from fluid.</p> |
