Verfahren zur Herstellung von Mikrostrukturen

摘要

Microelectronic structure formed by direct scanning of surface using lasers while the object is moved on a table The system uses a pair of lasers [S1,S2] that have the same diameters [D] and the overlap distance between them can be varied in increments to meet the raster grid size [delta x] using an electro optical deflector. When the single beams are of 0.5 micron diameter the structure width is from 0.5 to 1 micron. the maximum relative velocity of the table is defined in terms of the grid size and scanning rate.