| 摘要 |
A clean room system is provided to form a vertical air stream and to maintain cleanliness uniformly by configuring a lower circulation space with multiple layers. Process equipments(111a,111b,111c) are prepared in a clean room(110) in which a process is performed. An upper circulation space(120) is prepared on an upper portion of the clean room. A lower circulation space(130) is prepared on a lower portion of the clean room and includes circulation spaces(130A,130B) comprised of at least two layers. A dry coil(140) is prepared at a side of the lower circulation space. An air stream generating apparatus is installed on a boundary surface of the clean room and an upper clean room. The air stream generating apparatus is comprised of a fan and a filter. The fan absorbs an upper air by rotating. The filter filters floating particles of the air absorbed by the fan.
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