发明名称 |
METHOD OF MANUFACTURING PRINTER HEAD AND METHOD OF MANUFACTURING ELECTROSTATIC ACTUATOR |
摘要 |
After a movable electrode is formed on a sacrificial layer on a fixed electrode, the sacrificial layer is removed to form a space between the fixed electrode and the movable electrode. Thus, simple and accurate manufacture as well as simple integration of, for example, a driving circuit can be achieved.
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申请公布号 |
US2007002100(A1) |
申请公布日期 |
2007.01.04 |
申请号 |
US20060470769 |
申请日期 |
2006.09.07 |
申请人 |
TANIKAWA TORU;USHINOHAMA IWAO |
发明人 |
TANIKAWA TORU;USHINOHAMA IWAO |
分类号 |
B41J2/04;B41J2/045;B41J2/055;B41J2/16 |
主分类号 |
B41J2/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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