| 发明名称 |
Infrared ellipsometer has interferometer and sample holder with preceding polariser serving as interferometer beam splitter |
| 摘要 |
<p>An infrared ellipsometer (1) has an infrared source (2), interferometer, sample holder with polarisers on either side and detector behind it with the first polariser (10) in the interferometer (5) and serving as the interferometer beam splitter.</p> |
| 申请公布号 |
DE102005062180(B3) |
申请公布日期 |
2007.01.04 |
| 申请号 |
DE20051062180 |
申请日期 |
2005.12.23 |
| 申请人 |
GESELLSCHAFT ZUR FOERDERUNG DER ANALYTISCHEN WISSENSCHAFTEN E.V. |
发明人 |
KORTE, ERNST-HEINER;ROESELER, ARNULF |
| 分类号 |
G01J4/00;G01B9/02;G01J3/45;G01N21/21 |
主分类号 |
G01J4/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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