Electronic component surface shape recording procedure uses white light interferometer with in pixel processing using incoherent demodulation

摘要

Electronic component surface shape recording procedure uses a white light interferometer (15) to create intensity modulation by movement of component (11) and a reference mirror (9), creates the position or speed linked envelope using analogue signal processing with incoherent demodulation for each pixel, determines the in pixel (19) maximum position, stores and reads this using classical camera techniques. Independent claims are included for equipment using the procedure.