Micro-structural component producing method, involves providing intermediate plate for light of operating wavelength, where plate has refractive index greater that 1.60, and projecting mask part on light sensitive layer with projection lens

摘要

The method involves providing an intermediate plate (11) for light of operating wavelength, where the plate has refractive index greater that 1.60. A mask is illuminated, and a part of the mask is projected on a light sensitive layer with a projection lens. A distance of a surface (11a) of the plates turned towards the lens from a light emitting surface is provided, : Independent claims are also included for: (a) a micro-structural component (b) a projection exposure system with a projection lens. (c) and (d) another distance of the other plate surface (11b) turned towards the layer from a light coupling surface is provided. The plate is arranged so that the distances average to 10 percentage of the wavelength, during projection.