发明名称 MOS transistor with recessed gate and method of fabricating the same
摘要 A MOS transistor with a recessed gate and a method of fabricating the same: The MOS transistor comprises a semiconductor substrate, and a trench isolation layer located in a predetermined region of the semiconductor substrate for defining an active region. The trench isolation layer has a negative slope on at least a lower sidewall thereof. A recessed gate is located in a predetermined region of the active region, and a bottom surface of the recessed gate is placed adjacent the negatively slopped sidewall of the trench isolation layer.
申请公布号 US7157770(B2) 申请公布日期 2007.01.02
申请号 US20040884223 申请日期 2004.07.01
申请人 发明人
分类号 H01L29/76;H01L21/336;H01L21/8234;H01L21/8242;H01L29/78 主分类号 H01L29/76
代理机构 代理人
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