| 摘要 |
An AGV(Automatic Guided Vehicle) and a method for conveying a cassette are provided to correct the positional error of a slide, thereby preventing the damage of substrates within a cassette during convey of the cassette, by using a position sensor of the slide and a mark plate of the cassette. A cassette(150) contains a plurality of substrates, and a mark plate(152) is attached on a rear surface of the cassette. The cassette is mounted on a mounting part(320). A robot arm(330) is formed under the mounting part, and loads the cassette to process apparatuses for respective process steps. The robot arm has a first position sensor(337), which reads information of the mark plate to sense the position of the cassette. A body supports the mounting part and the robot arm. A telecommunication sensor(350) is formed at one side of the body, and tele-communicated with adjacent stockers or apparatuses. A second position sensor(340) senses whether the stockers or the apparatuses are adjacent to desired regions or not. A conveyer is formed under the body. |
