| 摘要 |
Upright transfer apparatus and method for a substrate are provided to minimize an occupational area, to reduce fabrication costs, and to improve the yield. An upright transfer apparatus includes a base table(110), a substrate rotating mechanism, and a substrate waiting port. The substrate rotating mechanism(120) is arranged to move up and down on the base table. The substrate rotating mechanism is capable of rotating vertically a substrate of a substrate transfer robot. The substrate waiting port is arranged on the base table in order to load uprightly the substrate. The substrate waiting port includes a plurality of slots. The upright transfer apparatus further includes a substrate up/down lifter capable of loading/unloading the substrate to/from the substrate waiting port.
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