METHOD OF FILLING A OPENING AND METHOD OF FORMING A TRENCH ISOLATION STRUCTURE USING THE SAME

摘要

A method of filling an opening and a method of forming a trench isolation structure using the same are provided to increase density of a filler of the opening by using an expansible member formed on an inner surface of the opening. An opening(104) is formed by etching partially a substrate(100). An expansible member(106b) is formed on a sidewall of the opening. The expansible member is filled with a plurality of fillers(108a,108b). The volume of the expansible member is enlarged to increase the density of the fillers formed within the opening. The expansible member is formed with polysilicon. The volume of the expansible member is enlarged by performing a thermal oxidation process.