发明名称 |
Master oscillator/power amplifier excimer laser system with pulse energy and pointing control |
摘要 |
Pulse parameters of a gas discharge laser system can be optimized and controlled for precision applications such as microlithography. Important laser pulse parameters typically vary in the beginning of a pulse burst, and the directionality of the output beam typically varies throughout the burst. In order to improve the performance of the laser system, the variation at the beginning of a pulse burst can be eliminated by extending the pulse pattern and shuttering the output during periods of significant parameter variation. A fast shutter such as an acousto-optical modulator can be used to prevent output during the burst transition processes. Elements such as acousto-optical cells also can be used in combination with a fast position sensor to steer the direction of the output beam, in order to adjust for variations in the direction of the beam between pulses in a burst.
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申请公布号 |
US7158553(B2) |
申请公布日期 |
2007.01.02 |
申请号 |
US20040776404 |
申请日期 |
2004.02.11 |
申请人 |
LAMBDA PHYSIK AG |
发明人 |
GOVORKOV SERGEI V.;WIESSNER ALEXANDER O.;PAETZEL RAINER;BRAGIN IGOR |
分类号 |
H01S3/22;H01S3/10;H01S3/223;H01S3/225;H01S3/23 |
主分类号 |
H01S3/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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