发明名称 |
Method for providing whisker-free aluminum metal lines or aluminum alloy lines in integrated circuits |
摘要 |
A method for providing whisker-free aluminum metal lines or aluminum alloy lines in integrated circuits includes the following steps: providing a substrate; providing a whisker-containing layer made of aluminum metal or an aluminum alloy on the substrate; back-etching and/or resputtering the whisker-containing layer such that the whiskers are essentially removed; and structuring the whisker-free layer into the lines.
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申请公布号 |
US7157381(B2) |
申请公布日期 |
2007.01.02 |
申请号 |
US20040868309 |
申请日期 |
2004.06.15 |
申请人 |
NANYA TECHNOLOGY CORPORATION |
发明人 |
EFFERENN DIRK;HAHN JENS;KAHLER UWE;LIN CHUNG-HSIN;BACHMANN JENS;LIN WEN-BIN;BONSDORF GRIT |
分类号 |
H01L21/302 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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