SEMICONDUCTOR SUBSTRATE INPUT-OUTPUT APPARATUS AND EQUIPMENT FOR PROCESSING A SEMICONDUCTOR SUBSTRATE HAVING THE SAME

摘要

A semiconductor substrate input/output apparatus and semiconductor substrate processing equipment with the same are provided to treat a semiconductor substrate without substrate transfer accidents by using an aligner capable of emitting a visual signal. A semiconductor substrate input/output apparatus includes a port stage, an input/output shutter, and aligner. The port stage is used for receiving a container with semiconductor substrates from a transfer capable of moving along a ceiling path of a clean room and transferring the container to the transfer. The input/output shutter(135) is installed between the port stage and a bit of semiconductor substrate processing equipment in order to load/unload the semiconductor substrates of the container to/from the equipment. The aligner(141,142) is installed over the port stage in order to align the container and the transfer in position. The aligner is capable of emit a visual signal.