| 摘要 |
A method of filling cold liquefied gas is provided to evaporate the liquid pressed by the pump and easily fill the cold liquefied gas into a high pressure gas container without denaturing the gas by installing an evaporator at the discharge part of the pump. A method of filling cold liquefied gas fills the cold liquefied gas into a high pressure gas filling container(C) by using a cold transfer pipe as an insulation pipe and using a pump. The cold liquefied gas is chosen from NF3, nitrogen, oxygen, argon, SF6, AHC1, AHBr, CF4, and C2F6. The liquid pressed by the pump is directly filled into the container or evaporated and filled as a gas in the container by mounting an evaporator at the discharge part of the pump.
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