SPUTTERING APPARATUS

摘要

A sputtering equipment capable of preventing damage of the susceptor by changing a material of a susceptor and a connection structure of the susceptor is provided. A sputtering equipment comprises: a plate(10); and a susceptor(20) which has fixing holes(24,34) formed at both sides thereof such that the susceptor can be fixed onto the plate, and which is made of a glass material or a metallic material, wherein the susceptor is completely fixed onto the plate through first fixing holes and is loosely fixed onto the plate through second fixing holes. The second fixing holes have diameter at least larger than that of the first fixing holes. The sputtering equipment further comprises screws inserted into the second fixing holes, wherein the screws comprise a screw column(42b) inserted into the second fixing holes, and a screw cover(42a) which is integrally formed with the screw column and has diameter at least larger than that of the second fixing holes.