| 摘要 |
A wafer transfer apparatus and a wafer transfer method are provided to prevent the damage of a transfer arm or contamination of process equipment by using a predetermined sensor capable of detecting the vibration applied to the transfer arm. A wafer transfer apparatus includes a support unit, a transfer arm, a control unit and a sensor. The support unit(110) is used for supporting a wafer. The transfer arm(120) is installed at one side of the support unit in order to transfer the wafer. The control unit(140) is used for controlling the operation of the transfer arm. The sensor(130) is used for detecting the vibration applied to the support unit or the transfer arm. The sensor is installed at one end portion of the transfer arm.
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