发明名称 Method for producing ultra-thin semiconductor device
摘要 A method for producing an ultra-thin semiconductor chip and an ultra-thin back-illuminated solid-state image pickup device utilizing a semiconductor layer formed on a support substrate via an insulating layer to improve separation performance of a semiconductor layer from a support substrate and thereby improve the productivity and quality. The method uses two porous peeling layers on opposite sides of a substrate to produce an ultra-thin substrate.
申请公布号 US7157352(B2) 申请公布日期 2007.01.02
申请号 US20030680548 申请日期 2003.10.07
申请人 SONY CORPORATION 发明人 YAMANAKA HIDEO
分类号 H01L21/30;H01L27/14;H01L21/00;H01L21/46;H01L23/00;H01L27/146;H01L27/148 主分类号 H01L21/30
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