| 摘要 |
A process chamber having a temperature controller is provided to avoid or minimize generation of temperature fluctuation by installing a temperature controller in a cover part in a chamber body such that the temperature controller used to be installed outside the chamber body. A wafer is transferred to a chamber body(113) in which a fabricating process is carried out. A chamber lid(111) functions as a lid of the chamber body, installed in the upper part of the body. A temperature controller(115) controls the temperature of the process chamber, installed in the chamber lid. The temperature controller can be installed in a cover of the chamber lid.
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