| 摘要 |
A purge system for a product container and a table for use in the purge system are provided to suppress a pressure difference generated between an inlet port and an outlet port by simultaneously supplying and discharging gas from the purge system. Gas inlet ports(7,14) are disposed on a facing surface of a container to a table, and are used when supplying the predetermined gas to an interior of the container. Gas outlet ports(9,16) are disposed on a facing surface of the container to the table, and are used when discharging the gas within the container to an exterior of the container. A table side gas supply port is disposed on a facing surface of the table to the container. A table side gas outlet port is disposed on the facing surface of the table to the container. An interior of a gas inlet system is closed from an exterior of the gas inlet system. The interior of the gas outlet system communicates with the exterior of the gas outlet system through a communication path.
|
