发明名称 |
Reliability evaluation test apparatus, reliabilityevaluation test system, contactor, and reliabilit y evaluation test method |
摘要 |
A reliability evaluation-test apparatus (10) of this invention includes a wafer storage section (12) which stores a wafer (W) in a state wherein the electrode pads of a number of devices formed on the wafer and the bumps of a contactor (11) are totally in electrical contact with each other. The wafer storage section (12) transmits/receives a test signal to/from a measurement section (15) and has a hermetic and heat insulating structure. The wafer storage section (L2) has a pressure mechanism (13) which presses the contactor (11) and a heating mechanism (14) which directly heats the wafer (W) totally in contact with the contactor (11) to a predetermined high temperature. The reliability of an interconnection film and insulating film formed on the semiconductor wafer are evaluated under an accelerated condition.
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申请公布号 |
SG127775(A1) |
申请公布日期 |
2006.12.29 |
申请号 |
SG20050003524 |
申请日期 |
2002.11.27 |
申请人 |
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发明人 |
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分类号 |
G01R31/26;G01R1/04;G01R31/28;G01R31/30;H01L21/66 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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