发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a highly reliable BGA type semiconductor device. <P>SOLUTION: The semiconductor device comprises a pad electrode 4 formed on a semiconductor substrate 1 through insulating films 2 and 3, a plating layer 7 formed on the surface of the pad electrode 4, a conductive terminal 9 formed on the surface of the plating layer 7 and connected electrically with the pad electrode, and a first passivation film 5 formed to cover the insulating films 2 and 3 and the side end of the pad electrode 4 wherein the exposed portion 8 of the pad electrode 4 causing corrosion is covered by forming a second passivation film 10 to cover the first passivation film 5 and a part of the sidewall of the plating layer 7 and the conductive terminal 9. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006351766(A) 申请公布日期 2006.12.28
申请号 JP20050174921 申请日期 2005.06.15
申请人 SANYO ELECTRIC CO LTD 发明人 MORITA YUICHI;ISHIBE SHINZO;NOMA TAKASHI;OTSUKA HISAO;TAKAO YUKIHIRO;KANAMORI HIROSHI
分类号 H01L21/60;H01L23/12 主分类号 H01L21/60
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