| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a thin film magnetic head capable of attaining track narrowing, preventing defects of shape and short-circuiting, and improving a yield. SOLUTION: By adopting a lift-off technique using a flattening technique by CMP to form a track width and height of an element, and a structure and a process for locating a CMP dummy film 16, the defects of shape and short-circuiting are reduced and a high yield is secured even in the narrow track width. COPYRIGHT: (C)2007,JPO&INPIT |
