| 摘要 |
PROBLEM TO BE SOLVED: To provide a lighting system for inspection radiating many kinds of illumination light. SOLUTION: The lighting system 2 for inspecting a CCD image sensor 20 comprises: a light source optical system 3 for emitting the illumination light; a plurality of kinds of optical parts for changing the characteristic of the illumination light; an optical part holder 4 for mounting the plurality of kinds of optical parts; a hand 5 for gripping the optical parts, and a robot 6 for positioning this hand 5. When a wide angle lens 22 is used as an optical part, the wide angle lens 22 is positioned in the Z axis direction, and the focus is adjusted. COPYRIGHT: (C)2007,JPO&INPIT
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