| 发明名称 |
HEATER FOR HEATING A WAFER AND METHOD FOR PREVENTING CONTAMINATION OF THE HEATER |
| 摘要 |
A method for preventing contamination of a heater which is used for heating a wafer with a wafer bevel contains not directly heating the wafer bevel when using the heater to heat the wafer.
|
| 申请公布号 |
US2006292896(A1) |
申请公布日期 |
2006.12.28 |
| 申请号 |
US20060464209 |
申请日期 |
2006.08.14 |
| 申请人 |
TENG HSIEN-CHE;LIN CHIN-FU;CHU CHUN-HAO |
发明人 |
TENG HSIEN-CHE;LIN CHIN-FU;CHU CHUN-HAO |
| 分类号 |
H01L21/66;H01L21/00 |
主分类号 |
H01L21/66 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
