| 摘要 |
A storage robot including a sealing cover is provided to reduce production of leak due to particles attached to a sealing portion of the storage robot, thereby reducing inflow of particles into a load lock chamber. A storage shaft(100) has one end positioned in a load lock chamber(102), in which a vacuum state is maintained, and the other end positioned outside the load rock chamber. A first sealing part(104) is installed at a boundary portion between internal and external portions, and encloses the storage shaft to prevent the load lock chamber from being leaked when the storage shaft moved up and down. A sealing cover(106) covers the first sealing portion to prevent attachment of particles.
|
