| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser device capable of generating a laser beam causing less processing failures. <P>SOLUTION: The laser device comprises two or more light sources 11a-11c containing laser array stacks 12a-12c. Laser beams 32b and 32c are deflected by a slit mirror and a polarization beam splitter, respectively, and are compounded with a laser beam 32a. These laser beams have mutually an inclined axis and mutually parallel slow axis direction. A condensing optical system 20 condenses a laser beam from each light source to a position distant along a direction perpendicular to the slow axis direction. By this way, a laser beam is obtained which has an intensity profile of a top hat type along a direction perpendicular to the slow axis direction. <P>COPYRIGHT: (C)2007,JPO&INPIT |
