| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a refining/packing device for ultrahigh purity liquefied carbon dioxide where high purity liquefied carbon dioxide in a liquid form as raw material is introduced into a vaporizer, gaseous carbon dioxide is discharged from the vapor phase part thereof, thus many impurities such as solid substances and soluble substances in the fed liquefied carbon dioxide are made to remain in the liquid phase part, so as to be the gaseous carbon dioxide having reduced impurities, and refining/packing for ultrahigh purity liquefied carbon dioxide can be performed. <P>SOLUTION: Regarding the refining/packing device for ultrahigh purity liquefied carbon dioxide, in a refining/packing device where carbon dioxide from a raw material vessel 2 is fed to a rectifying tower 7, and ultrahigh purity refining liquefied carbon dioxide is refined at the rectifying tower 7, and is packed into a packing vessel 11, a vaporizer 3 capable of discharging gaseous carbon dioxide from the vapor phase part in the vessel and feeding the same to the rectifying tower is interposed in a feed passage 8 for feeding carbon dioxide from the raw material vessel. <P>COPYRIGHT: (C)2007,JPO&INPIT |
