| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element which has a high durability for an external force applied to a film face direction, a method for manufacturing the piezoelectric element, and a liquid discharge head that uses the piezoelectric element. <P>SOLUTION: A substrate 82 on which a piezoelectric film is formed is placed on a substrate holder 84. The substrate holder 84 is driven by a substrate holder driver 86 for varying an angle θ, formed between the substrate 82 and a target member 96. Furthermore, the substrate holder 84 can be rotated about a rotational axis AX which is substantially vertical to the target member 96 by the substrate holder driver 86. Thus, when the piezoelectric film of a structure where pole-like crystal bodies are gathered is formed, the inclination angle of the crystal body can be controlled with respect to the substrate 82. <P>COPYRIGHT: (C)2007,JPO&INPIT |
