| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an atmospheric pressure plasma treatment capable of achieving a stable and uniform plasma treatment. <P>SOLUTION: The atmospheric pressure plasma treatment method performs a surface treatment on a substance to be treated 24 by a plasma 29 by generating the plasma 29 at a plasma treatment part 20 by impressing electric power between a pair of electrodes 26, 27 facing each other while supplying treatment gas to a gas flow passage 23 passing through the plasma treatment part 20 under atmospheric pressure. The plasma treatment method includes a pressure gradient fluctuation reducing process reducing the pressure gradient generated along the gas flow passage 23 at neighboring area of the plasma treatment part 20 during the surface treatment, by using pressure valves 30a, 30b serving as a gas flow adjusting structure. <P>COPYRIGHT: (C)2007,JPO&INPIT |
