发明名称 PROBE, MULTILAYER SUBSTRATE AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which can realize SiP, has normal probe functions, probe card functions and the like, and can be reduced in size and responsive to high frequency. SOLUTION: The semiconductor device 1 is provided with a plurality of metal needles 3, in order to have probe functions, and a multilayer substrate 5, layered in multiple layers with low temperature calcination ceramics (LTCC). The multilayer substrate 5 has a rectangular parallelepiped geometry, and a plurality of metal needles 3 are attached to one side face 5a of it. The semiconductor device 1 comprises a chip 7 as a semiconductor element and a passive element 9 as a semiconductor element, and the chip 7 and the passive element are loaded on the multilayer substrate 5. Inside the multilayer substrate, wires 11 electrically connecting the metal needles 3 and the chip 7 are provided. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006349402(A) 申请公布日期 2006.12.28
申请号 JP20050173568 申请日期 2005.06.14
申请人 FUKUOKA PREF GOV SANGYO KAGAKU GIJUTSU SHINKO ZAIDAN;HIRAI SEIMITSU KOGYO CORP 发明人 TOMOKAGE HAJIME;HIRAI KOMEI;KONO SHIGEKATSU
分类号 G01R1/073;G01R31/26;H01L21/66 主分类号 G01R1/073
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