| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck in which, on one main surface of a plate-shaped ceramic member, a series of recesses are formed, and which is excellent in the property that a wafer W is uniformly heated, and also to provide a method of manufacturing the chuck. SOLUTION: In the electrostatic chuck 1, one main surface of a plate-shaped ceramic member 2 made of a nitride ceramic material is used as a surface 8 for mounting the wafer W thereon. A series of recesses 2a are made in the mounting surface 8, and a curved recess 9 is formed in the bottom of each of the series of recesses 2a. Variations in the depths of the series of recesses 2a with respect to the average depth of the series of recesses 2a are not larger than 20%, and the depths of the series of recesses 2a are within 10 to 500μm. COPYRIGHT: (C)2007,JPO&INPIT |
