| 摘要 |
PROBLEM TO BE SOLVED: To provide an electric connector for a board support reducing electrical arcing in a plasma environment, passing an RF current in many processing cycles with high reliability, permitting the thermal expansion of a connector structure without losing electrical contacts, and further facilitating detachment and exchange. SOLUTION: The board support is provided with a ceramic disk provided with an electrode that can be charged through an electrode terminal. In an electric connector 20, an external power source is connected with the electrode terminal 26. The electric connector 20 has: a pair of facing pincer arms 74a and 74b; a groove 90 of a size fitted around the electrode terminal 26; and through holes 104a to 104d that are aligned for receiving a clamping assembly 108 capable of clamping the facing pincer arms in the vicinity of the electrode terminal 26. COPYRIGHT: (C)2007,JPO&INPIT |
