IMAGING RECIPE GENERATING APPARATUS FOR SCANNING TYPE ELECTRONIC MICROSCOPE, METHOD THEREOF, AND SEMICONDUCTOR PATTERN SHAPE EVALUATION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an imaging recipe generating apparatus and a method thereof in an SEM and the like having reduced a generation period by automatic generation of an imaging recipe for evaluating pattern shape through analysis using a CAD image converted from the CAD data, by measuring each kind of size value such as wiring width of pattern from the observed image. SOLUTION: In the imaging recipe generating apparatus for SEM observation of a semiconductor pattern using a scanning type electronic microscope, a CPU (CAD image generating unit) 1251 for generating a CAD image by conversion into the image on the basis of the CAD data is constituted with an image quantizing width determining processing unit 12511, a luminosity information assignment processing unit 12512, and a pattern shape conversion processing unit 12513. COPYRIGHT: (C)2007,JPO&INPIT