| 摘要 |
PROBLEM TO BE SOLVED: To provide a large-power X-ray generator by increasing energy of an electron beam by arranging a target so as to bring it extremely close to a passage of a cooling medium to efficiently turn down the heat generated by the electron beam. SOLUTION: This X-ray generator includes: a vacuum vessel 101; a rotary shaft target 103 including a target arranged integrally with and in the vicinity of a shaft surface or the shaft; a bearing for airtightly supporting the rotary shaft target 103 to the vessel 101; a rotary drive means for the rotary shaft target; a cooling means for supplying a cooling medium circulating in the inside of the rotary shaft of the rotary shaft target; and an electron source for generating an electron beam for X-ray excitation. The X-ray generator is so structured that the electron beam enters into and collides with the target while keeping an angle with respect to the rotary shaft and generates an X-ray beam. COPYRIGHT: (C)2007,JPO&INPIT
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