| 摘要 |
PROBLEM TO BE SOLVED: To provide a handling device capable of easily transferring a transferred material housed in a vacuum container, while maintaining vacuum condition of the vacuum container, in a film forming device. SOLUTION: This handling device 4 is provided with a grip part 4a, an operating part 4b, a connecting part 4c and a connecting part supporting part 4d. The grip part 4a is arranged inside the vacuum container 10, and has a pair of rods 43 and 44 connected to each other freely to be opened and closed. The operating part 4b is arranged outside the vacuum container 10, and has handles 41a and 41b for operating the rods 43 and 44 to be opened and closed. The connecting part 4c connects the grip part 4a and the operating part 4b to each other, and has shafts 42a and 42b for transmitting movement of the operating part 4b to the rods 43 and 44. The connecting part supporting part 4d having a flexible cylindrical part 47, into which the connecting part 4c is inserted, is air-tightly fixed to the vacuum container 10 and the connecting part 4c in one end and the other end of the cylindrical part 47. COPYRIGHT: (C)2007,JPO&INPIT
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