SUBSTRATE TRANSFER ROBOT AND PROCESSING APPARATUS

摘要

A transfer robot is composed of two concentrically arranged driving sources; a driving arm protruding from a side plane of each driving source; two driven arms arranged at the other end of the driving arm; and a hand arranged at a leading end of the driven arm to form a pair with another. The transfer robot advances, retracts and turns the first hand and the second hand through each arm by turning the driving sources in different directions or in the same direction. A processing apparatus provided with the transfer robot is provided with a plurality of placing chambers whose planar shapes are square, by connecting the chambers with connecting chambers, and transfer and receive substrates to and from two process chambers provided on each side wall plane of the placing chamber, by the substrate transfer robot arranged close to the center inside the placing chamber.