| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture transfer arms and the whole device at a low cost. <P>SOLUTION: The transfer of a reticle from a reticle carrying-in section 29 wherein at least a part of is arranged on the same circular arc to the reticle carrying-in section 29 via a reticle stage RST can be carried out by only effecting rotational motions of carrying-in arms 82a, 82b in the predetermined direction with respect to the center axis of the circular arc as a rotation axis so that the transfer arms 82a, 82b can be simplified, thereby manufacturing the transfer arms 82a, 82b as well as the whole exposure device at a low cost. <P>COPYRIGHT: (C)2007,JPO&INPIT |
