| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical element holding device and a lens barrel which can effectively suppress distortion in an optical element by temperature changes, the gravity of the optical element, external impact or the like, and to provide an exposure apparatus and a method for manufacturing a device for efficiently manufacturing a device with a high integration degree in a high yield. <P>SOLUTION: A plurality of slits 36a to 36c penetrating in a direction parallel to the optical axis of a lens 28 are formed in a frame body 32 so as to segment a mounting section 34 in a convex form in a plan view. The mounting section 34 is linked to the frame body 32 as displaceable in a radial direction of the lens 28 via a plurality of pairs of notch springs 37a, 37b in a thin plate form. <P>COPYRIGHT: (C)2007,JPO&INPIT |
