| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aligning device that can reliably move an original plate film in a direction along an X-axis or Y-axis and around a θ axis. <P>SOLUTION: The aligning device 100 aligns an original plate film (A) to a photosensitive substrate, and is equipped with a translucent plate 1 to which the original plate film (A) is stuck, a first holding frame 10 and a second holding frame 11 holding the translucent plate 1 at its peripheral part 1a, a fixing mechanism 20 fixing the translucent plate 1 to the first holding frame 10 and the second holding frame 11, a support/lifting unit 30 which supports the translucent plate 1 together with the first holding frame 10 and the second holding frame 11 as movable within a plane almost parallel to the translucent plate 1 and which moves the plate in a vertical direction, an alignment table 40 disposed below the second holding frame 11 and generating a driving force in a direction along the X-axis and the Y-axis or around the θ axis, and an arm 50 and others to transmit the driving force of the aligning table 40 to frame members 11b, 11d of the second holding frame 11. <P>COPYRIGHT: (C)2007,JPO&INPIT |
